FileVersion 1 1;
FileTimestamp 10-19-21 10:06:32;
InspectionStationID "AMAT" "COMPLUS 3T" "HYCPS04";
SampleType WAFER;
ResultTimestamp 10-19-21 10:04:09;
LotID "HJU008";
SampleSize 1 200;
SetupID "03R3" 10-19-21 10:03:42;
StepID "IMD2_SRO";
SampleOrientationMarkType NOTCH;
OrientationMarkLocation DOWN;
DiePitch 2.4899600000e+03 2.2599200000e+03;
DieOrigin 0.000000 0.000000;
WaferID "25";
Slot 25;
SampleCenterLocation 2.3948000000e+03 2.0903200000e+03;
ClassLookup 276